کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
1660220 | 1517689 | 2009 | 4 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
A self-DLC coated cathode plasma source
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کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه
مهندسی مواد
فناوری نانو (نانو تکنولوژی)
پیش نمایش صفحه اول مقاله
![عکس صفحه اول مقاله: A self-DLC coated cathode plasma source A self-DLC coated cathode plasma source](/preview/png/1660220.png)
چکیده انگلیسی
A novel self-microwave plasma source modified by diamond-like carbon (DLC) coating self-cathode for density enhancement was devised. This simple method had been once routed for enhanced efficient microwave plasma with very low-cost. The coating parameters in fabrication of the self-coated DLC cathode for plasma density enhancement were investigated. DLC-Al cathodes coating by self cathode of microwave plasma source were fabricated to control and yielded strong non-activated emission. The novel cathodes showed enhancement of current density up to 240%. In addition, the contamination in the plasma source could be avoided with the new cathodes.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Surface and Coatings Technology - Volume 203, Issues 17–18, 15 June 2009, Pages 2743–2746
Journal: Surface and Coatings Technology - Volume 203, Issues 17–18, 15 June 2009, Pages 2743–2746
نویسندگان
A. Deachana, D. Boonyawan, B. Yodsombat,