Gas flow sputtering - An approach to coat complex geometries and Non Line of Sight areas

In this investigation different complex geometries such as u-shaped profiles and pipes were coated with pure titanium. The influence of the angle between gas flow direction and substrate surface (incident angle) on coating thickness distribution, microstructure and crystal orientation was examined by scanning electron microscopy (SEM) and X-ray diffraction (XRD). The results show that a stripe or a pipe placed parallel to the gas flow direction is coated over the whole length. The pipes are coated outside as well as inside. The circumference of a cylinder positioned perpendicular to the gas flow direction is completely covered with material. In all cases the coating thickness varies over the surface, which is caused by the interplay between convection and out-diffusion as the main deposition mechanisms.