Process structure properties relationship during formation of CrN and AlN layers on H13 Steel

Two deposition methods for producing CrN/AlN bilayers on H13 steel substrates were evaluated. The bilayers were deposited using non-balanced magnetrons in a PVD reactive system in both a conventional manner and injecting extra N2 directly between the target and the substrate. During deposition plasma spectral lines were identified and followed by Optical Emission Spectroscopy (OES) and ion density and temperature using a Langmuir probe. The coatings were analysed by scanning electron microscopy equipped with energy dispersive X-ray microanalysis (SEM + EDS) and X-ray Diffractometry (XRD). Plasma and microstructural characterization indicated that extra N2 injection was central for the production of nitrided phase.