Preparation of super-hydrophobic films using pulsed hexafluorobenzene plasma

In this study, super-hydrophobic films were deposited in a one-step simple process by pulsed RF C6F6 plasma, and the influence of the duty-cycle (DC) on the surface structure and chemical characteristics of depositing fluorocarbon films was examined. The deposited coatings were analyzed by X-ray Photoelectron Spectroscopy (XPS), Fourier Transform Infrared Spectrometry (FTIR), Scanning Electron Microscopy (SEM), Transmission Electron Microscopy (TEM), and Contact Angle Analyzer. It was found that by decreasing the DC from 1 to 0.1, the rough structure of the film with a lot of particles was obtained. In addition, the super-hydrophobic property was obtained on this composite fluorocarbon film. Finally, the adhesion of fluorocarbon films could be increased by deposited on the cotton fiber substrates instead of Si wafer.