کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
1661942 1517703 2006 5 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Microstructure evolution and grain growth of nanocomposite TiN–TiB2 films: experiment and simulation
موضوعات مرتبط
مهندسی و علوم پایه مهندسی مواد فناوری نانو (نانو تکنولوژی)
پیش نمایش صفحه اول مقاله
Microstructure evolution and grain growth of nanocomposite TiN–TiB2 films: experiment and simulation
چکیده انگلیسی

Titanium–boron–nitride (TiN–TiB2) films deposited onto Si (100) at room temperature with different boron contents by reactive unbalanced magnetron sputtering have been analyzed by a combination of high-resolution transmission electron microscopy, X-ray photoelectron spectroscopy, and X-ray diffraction. Microstructure studies revealed that at low boron incorporation (up to about 9 at.%), the film microstructure was basically TiN with a [111] preferred orientation. As the B content increased to about 19 at.%, a two-phase nanocomposite structure was formed, showing nanocrystalline (nc-) solid solution Ti(N,B) grains within amorphous (a-) TiB2 matrices. Simultaneously, their preferred orientations gradually transformed from [111] to a mixture of [111] and [200]. When the B content reached about 27 at.% or above, nc-Ti(N,B) grains, embedding into matrix consisting of a-TiB2 and a-BN, became smaller and separate. These grains existed in either round or elliptical shape. Using Monte Carlo simulations, the effects of the mixed amorphous TiB2-BN phase on the microstructure evolution and grain growth in nanocrystalline Ti(N,B) were also studied. The results indicated that the formation of such an amorphous phase at the grain boundary could hinder the growth of Ti(N,B) grains and the mean grain size showed an exponential decay with boron concentration, in good agreement with our experimental observations.

ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Surface and Coatings Technology - Volume 200, Issues 22–23, 20 June 2006, Pages 6474–6478
نویسندگان
, , ,