کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
1662165 1517700 2006 6 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Synthesis of anticorrosion SiC and SiNx films from alkoxide solution using liquid injection PECVD
موضوعات مرتبط
مهندسی و علوم پایه مهندسی مواد فناوری نانو (نانو تکنولوژی)
پیش نمایش صفحه اول مقاله
Synthesis of anticorrosion SiC and SiNx films from alkoxide solution using liquid injection PECVD
چکیده انگلیسی

Monolithic SiC, SiNx and their duplex SiC–SiNx films were synthesized from hexamethyldisiloxane solution at 750 °C on Si wafer and SUS304 steel substrates using Ar/H2/N2 plasma enhanced chemical vapor deposition (PECVD). The films were characterized by scanning/transmission electron microscopy (SEM/TEM), X-ray diffraction (XRD) and X-ray photoelectron spectroscopy (XPS). Amorphous SiNx films were easily deposited on two kinds of substrates from thermal Ar/H2/N2 plasma, whereas crystalline SiC films synthesized using thermal Ar/H2 plasma was only achieved on Si substrate and severe etching of the steel substrate by the plasma was observed. By varying N2 flow rate from 4.5 l/min to zero at the intermediate period of the deposition process, a duplex SiC–SiNx film, consisting of a top SiC and an inner SiNx layer adjacent to the substrate, was obtained both on Si and steel substrates. The corrosive exposure test in KCl atmosphere at 650 °C indicated that the ceramic film-coated steel substrates demonstrated a much superior corrosion resistance in comparison with the uncoated one.

ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Surface and Coatings Technology - Volume 201, Issues 3–4, 5 October 2006, Pages 1160–1165
نویسندگان
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