کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
1663250 | 1008461 | 2006 | 5 صفحه PDF | دانلود رایگان |

Density, hardness and compressive stress of tungsten contained in an amorphous-hydrogenated-carbon matrix (W–C:H) have been studied as a function of composition and bias voltage. W–C:H coatings were deposited by reactive sputter deposition from a tungsten–carbide (WC) target on silicon substrate in an argon–acetylene plasma. W–C:H coatings obtained at different acetylene flow rates and substrate bias voltages, were characterized by scanning electron microscopy, X-ray diffraction, nanoindentation and substrate curvature method. It has been observed that compressive stress, hardness and reduced Young's modulus decrease when the acetylene flow is increased from 0 to 10 sccm. Also, compressive stress and hardness increases with the substrate bias voltage. In particular, for W–C:H coatings obtained at 5 sccm of acetylene flow, the compressive stress and hardness increase from − 1.6 GPa to − 3.2 GPa and from 19 GPa to 24 GPa, respectively, when increasing the substrate bias from 0 to 200 V. The variation of the internal stress, hardness and density of the coatings is discussed in terms of composition and structure of the W–C:H coatings.
Journal: Surface and Coatings Technology - Volume 201, Issue 7, 20 December 2006, Pages 4284–4288