کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
1663284 1008464 2006 12 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Properties of superhard nc-TiN/a-BN and nc-TiN/a-BN/a-TiB2 nanocomposite coatings prepared by plasma induced chemical vapor deposition
موضوعات مرتبط
مهندسی و علوم پایه مهندسی مواد فناوری نانو (نانو تکنولوژی)
پیش نمایش صفحه اول مقاله
Properties of superhard nc-TiN/a-BN and nc-TiN/a-BN/a-TiB2 nanocomposite coatings prepared by plasma induced chemical vapor deposition
چکیده انگلیسی

Using high frequency plasma chemical vapor deposition (P CVD) at a total pressure of several mbar with TiCl4, BCl3, N2 and H2 as reactants, superhard nanocomposite nc-TiN/a-BN and nc-TiN/a-BN/a-TiB2 coatings with hardness of 40–50 GPa were reproducibly deposited and characterized in terms of their phase composition, nanostructure, thermal stability, oxidation resistance and mechanical properties. By analogy with earlier studied systems nc-MnN/a-Si3N4 (M=Ti, W, V) and nc-TiN/a-Si3N4/a- and nc-TiSi2, the maximum hardness of the nc-TiN/a-BN and nc-TiN/a-BN/a-TiB2 coatings was obtained at the percolation threshold when there is about one monolayer of thin continuous tissue of a-BN between the TiN nanocrystals. It was shown that the thermal stability and oxidation resistance of these coatings is fairly high but lower than that of the nc-TiN/a-Si3N4 and nc-TiN/a-Si3N4/a-TiSi2 coatings.

ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Surface and Coatings Technology - Volume 200, Issue 9, 8 February 2006, Pages 2978–2989
نویسندگان
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