کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
1663316 | 1008465 | 2006 | 9 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
TiSiN nanocomposite coatings by chemical vapor deposition in a fluidized bed reactor at atmospheric pressure (AP/FBR-CVD)
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کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه
مهندسی مواد
فناوری نانو (نانو تکنولوژی)
پیش نمایش صفحه اول مقاله
چکیده انگلیسی
TiSiN nanocomposite coatings were deposited on stainless steel by chemical vapor deposition in a fluidized bed reactor at atmospheric pressure (AP/FBR-CVD) by reaction of TiCl4 and SiCl4 with NH3 at 850 °C. Coatings were characterized by means of GD-OES, XPS and XRD. TiSiN coatings with a Si content of 9 at.% showed a hardness of 28 GPa (the hardness of TiN and SiNx coatings was around 21 GPa) and a lower oxidation rate under dry air at 600 °C. Our results show for the first time that AP/FBR-CVD can be tuned for the deposition of nanocomposite ceramic coatings.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Surface and Coatings Technology - Volume 201, Issue 6, 4 December 2006, Pages 2217–2225
Journal: Surface and Coatings Technology - Volume 201, Issue 6, 4 December 2006, Pages 2217–2225
نویسندگان
J. Perez-Mariano, K.-H. Lau, A. Sanjurjo, J. Caro, D. Casellas, C. Colominas,