کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
1663424 1008469 2005 6 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Phase composition and tribological properties of copper/carbon composite films
موضوعات مرتبط
مهندسی و علوم پایه مهندسی مواد فناوری نانو (نانو تکنولوژی)
پیش نمایش صفحه اول مقاله
Phase composition and tribological properties of copper/carbon composite films
چکیده انگلیسی

Copper/carbon composite films have been deposited on steel and silicon substrates by an hybrid technique combining sputter-deposition of copper and microwave plasma-assisted chemical vapor deposition of carbon from argon–methane mixtures of various concentrations.The composition of films was determined by Rutherford backscattering spectroscopy (RBS) and energy recoil detection analyses (ERDA). The crystallographic structure of films was identified by X-ray diffraction (XRD) techniques. The dry friction properties of films were investigated by ball-on-disk tribological tests conducted at room temperature in room air.Copper/carbon films containing 25–75 at.% of carbon were produced as the methane concentration in the gas phase was varied from 20% to 100%. These composite films consisted of copper crystallites and hydrogenated amorphous carbon (a-C:H) phase. The size of copper crystallites was in the range 2–20 nm. An abrupt increase in carbon content in the films was observed as the methane concentration in the gas phase increased from 60% to 70%.The tribological behavior tested in ball-on-disc geometry and microhardness of these Cu/a-C:H composite films are analyzed and discussed in terms of their microstructure, morphology and composition.

ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Surface and Coatings Technology - Volume 200, Issue 7, 21 December 2005, Pages 2146–2151
نویسندگان
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