Sputtered Fe1−x(N1−yCy)x films obtained in various (Ar-N2-CH4) reactive plasmas

In a variable (Ar-N2-CH4) reactive plasma, Fe1−x(N1−yCy)x ternary films keeping x close to 0.5 with various y values within the range 0-0.46 are obtained. The crystalline carbonitrides detected by X-Ray Diffraction evolves from a γ″/γ‴ mixture for y = 0 to ζ for y = 0.41-0.46 passing through a ζ/γ‴ mixture for y = 0.33.