کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
1677518 1518354 2013 6 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Extraction of topographic and material contrasts on surfaces from SEM images obtained by energy filtering detection with low-energy primary electrons
موضوعات مرتبط
مهندسی و علوم پایه مهندسی مواد فناوری نانو (نانو تکنولوژی)
پیش نمایش صفحه اول مقاله
Extraction of topographic and material contrasts on surfaces from SEM images obtained by energy filtering detection with low-energy primary electrons
چکیده انگلیسی

Secondary electron microscope (SEM) images have been obtained for practical materials using low primary electron energies and an in-lens type annular detector with changing negative bias voltage supplied to a grid placed in front of the detector. The kinetic-energy distribution of the detected electrons was evaluated by the gradient of the bias-energy dependence of the brightness of the images. This is divided into mainly two parts at about 500 V, high and low brightness in the low- and high-energy regions, respectively and shows difference among the surface regions having different composition and topography. The combination of the negative grid bias and the pixel-by-pixel image subtraction provides the band-pass filtered images and extracts the material and topographic information of the specimen surfaces.


► Scanning electron (SE) images contain many kind of information on material surfaces.
► We investigate energy-filtered SE images for practical materials.
► The brightness of the images is divided into two parts by the bias voltage.
► Topographic and material contrasts are extracted by subtracting the filtered images.

ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Ultramicroscopy - Volume 124, January 2013, Pages 20–25
نویسندگان
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