On the tip calibration for accurate modulus measurement by contact resonance atomic force microscopy

Accurate quantitative elastic modulus measurements using contact resonance atomic force microscopy require the calibration of geometrical and mechanical properties of the tip as well as the choice of a suitable model for describing the cantilever-tip-sample system. In this work, we demonstrate with both simulations and experiments that the choice of the model influences the results of the calibration. Neglecting lateral force results in the underestimation of the tip indentation modulus and in the overestimation of the tip-sample contact radius. We propose a new approach to the calibration and data analysis, where lateral forces and cantilever inclination are neglected (which simplifies the calculations) and the tip parameters are assumed as fictitious.

► A calibration procedure is proposed for quantitative contact resonance AFM.
► It allows the use of simple analytical model that neglects lateral forces.
► Tip parameters are used as fictitious parameters.
► The approach is demonstrated with simulations and experiments.