Comparison of convergent beam electron diffraction methods for simultaneous structure and Debye Waller factor determination

► We compare sensitivity to structure and DW factor change of zone-axis related CBED methods. ► Increasing number and amplitude of excited Bloch wave branches improves sensitivity. ► Off-zone axis CBED excites more strong Bloch waves than the zone-axis method. ► Off-zone axis CBED excites many anti-bound Bloch wave states that probe bond electrons. ► Off-zone axis methods are more sensitive to structure and DW factor change.