Capturing the signature of single atoms with the tiny probe of a STEM

With their first scanning transmission electron microscope (STEM), Albert Crewe and his collaborators have succeeded 40 years ago in bringing to reality a dream for all electron microscopists, to see individual atoms. In the derivation of Crewe's pioneering work, the present review describes various historical and present steps, involving continuous instrumental and methodological developments as well as the preparation of suitable specimens. They have lead to the identification of individual atoms by electron energy-loss spectroscopy (EELS) and to the demonstration of atom-by-atom spectroscopy. Beyond these spectacular successes which open wide fields of use, most recent technical achievements, such as the introduction of monochromators on the incident electron beam or of optical spectrometers for recording spectra (in the visible as well as in the X-ray domain), will undoubtedly lead to refine the accessible signature of single atoms and molecules.

► We review the progress of EELS spectroscopy in the STEM microscope over past 40 years.
► Identification of individual atoms is demonstrated using spectrum-imaging techniques.
► Atom-by-atom EELS spectroscopy is performed on graphenic layers.