On the lateral resolution of scanning capacitance microscope based C-V measurements

The stray capacitance increases the dC/dV dependence and affects its relation to dopant concentration. The error is negligible at low doping levels but may attain the multiple of the value expected on high-doped materials. The stray field of a tip-on-cantilever probe is orders of magnitude larger than that of a pointed thin wire perpendicular to the surface. It has unexpected consequences-the local sensitivity achieved with the cantilever is less affected by the radius of curvature on the one hand and the calibration accuracy of the wire probe is less sensitive to the pitch of test structure used, on the other.