On the measurement of thickness in nanoporous materials by EELS

This work discusses thickness measurements in nanoporous MgO using the log-ratio method in electron energy-loss spectroscopy (EELS). In heterogeneous nanoporous systems, the method can induce large errors if the strength of excitations at interfaces between pores and the matrix is large. In homogeneous nanoporous systems, on the other hand, the log-ratio method is still valid, but the inelastic scattering mean-free-path is no longer equal to that in the same bulk system.

Research Highlights
► Application of EELS in nanoporous materials is different from that in bulk materials.
► The inelastic scattering mean-free-path in nanoporous system is no longer equal to that in the same bulk material.
► Thickness measurement using EELS is only appropriate in homogeneous nanoporous system.