کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
1678582 1009948 2006 11 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Precise measurement of third-order spherical aberration using low-order zone-axis Ronchigrams
موضوعات مرتبط
مهندسی و علوم پایه مهندسی مواد فناوری نانو (نانو تکنولوژی)
پیش نمایش صفحه اول مقاله
Precise measurement of third-order spherical aberration using low-order zone-axis Ronchigrams
چکیده انگلیسی

A method for the measurement of third-order spherical aberration coefficients (Cs)(Cs) is suggested, using low-order zone-axis Ronchigrams of a crystalline material. The validity of the method is confirmed using simulated and experimental Ronchigrams taken with various probe-forming lens configurations. The precision of the measured CsCs value is drastically improved compared with that obtained from the power spectrum-analysis method. In addition, a method for roughly estimating defocus values is presented.

ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Ultramicroscopy - Volume 106, Issue 3, February 2006, Pages 153–163
نویسندگان
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