EFTEM assistant: A tool to understand the limitations of EFTEM

The first version of a free tool for Gatan's Digital Micrograph™ is presented which aims to aid the energy-filtered TEM (EFTEM) community by predicting and correcting the most common sources of degradation. The software allows selection of either Krivanek's or Egerton's approach to account for the spatial resolution degradation caused by the electron optical aberrations. The effects of aberrations and signal ‘delocalization’ are combined to simulate the blurring caused in EFTEM elemental maps. Two microstructural features with ideal geometry are used to illustrate use of the software: spherical particles and parallel sided interfaces. The software also allows the simulation of the effects of the noise and drift in the final elemental map, independently or in combination. It can be easily demonstrated that when the dimensions of the feature of interest are comparable in scale to the image degradation factors, the effects of the latter should not be neglected. More importantly, the software can deconvolute the effects of the degradation factors, revealing the true dimensions and signal intensity of the feature of interest.