کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
1680877 | 1518680 | 2014 | 6 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
The SFM/ToF-SIMS combination for advanced chemically-resolved analysis at the nanoscale
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کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه
مهندسی مواد
سطوح، پوششها و فیلمها
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چکیده انگلیسی
The combination of Time-of-flight Secondary Ion Mass Spectrometry (ToF-SIMS) and Scanning Force Microscopy (SFM) allows the 3D-compositional analysis of samples or devices. Typically, the topographical data obtained by SFM is used to determine the initial sample topography and the absolute depth of the ToF-SIMS analysis. Here ToF-SIMS and SFM data sets obtained on 2 prototypical samples are explored to go beyond conventional 3D-compositional analysis. SFM topographical and material contrast maps are combined with ToF-SIMS retrospective analysis to detect features that would have escaped a conventional ToF-SIMS data analysis. In addition, SFM data is used to extrapolate the chemical information beyond the spatial resolution of ToF-SIMS, allowing the mapping of the chemical composition at the nanoscale.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms - Volume 339, 15 November 2014, Pages 85-90
Journal: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms - Volume 339, 15 November 2014, Pages 85-90
نویسندگان
Laetitia Bernard, Jakob Heier, Wolfgang Paul, Hans J. Hug,