کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
1680894 | 1518745 | 2012 | 5 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Analytical solution for depth scale calculations in Rutherford backscattering spectrometry
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کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه
مهندسی مواد
سطوح، پوششها و فیلمها
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چکیده انگلیسی
An analytic approximation is presented that allows a straightforward calculation of impurity concentration depth profiles from a measured Rutherford backscattering spectrum. The depth scale calculations consider energy-dependent stopping power data. Calculation of the concentration assumes Rutherford cross sections including electron screening effects. The solution for the depth scale has been verified to be within 2% of the exact numerical solution in the energy range down to 20% of the incident energy. The experimental depth profiles obtained for Au in Al and Ir in Si using MeV 12C12C projectile ions show good agreement with the present approximation.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms - Volume 272, 1 February 2012, Pages 18–22
Journal: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms - Volume 272, 1 February 2012, Pages 18–22
نویسندگان
D. Shakhvorostov, W.N. Lennard, P.R. Norton,