Multi-scale modeling of localized heating caused by ion bombardment

We have developed a multiscale modeling algorithm to incorporate both a Monte Carlo (MC) ion irradiation simulator and finite element analysis to simulate ion beam heating. The spatial distribution of displacements from the MC code was input into a 3-D FEA code to predict the temperature evolution upon ion bombardment. In order to simulate the flux effect, ions were introduced stochastically. We discuss the necessity to use both grid refinement and grid coarsening techniques to make such modeling possible, thus providing a basis to evaluate the impact on the microstructure of the substrate. The aforementioned approach was applied for the case of a 16 A cm−2 beam of 6 keV Ga+ ions to simulate FIB sample sectioning and thinning in a Si substrate.