کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
1681146 1518688 2014 5 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Room temperature diamond-like carbon coatings produced by low energy ion implantation
ترجمه فارسی عنوان
درجه حرارت اتاق مانند پوشش کربن الماسی تولید شده توسط ایمپلنت با یون کم انرژی
کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه مهندسی مواد سطوح، پوشش‌ها و فیلم‌ها
چکیده انگلیسی

Nanometre-smooth diamond-like carbon coatings (DLC) were produced at room temperature with ion implantation using 6 kV C3Hy+ ion beams. Ion beam analysis measurements showed that the coatings contain no heavy Z impurities at the level of 100 ppm, have a homogeneous stoichiometry in depth and a hydrogen concentration of typically 25 at.%. High resolution TEM analysis showed high quality and atomically flat amorphous coatings on wafer silicon. Combined TEM and RBS analysis gave a coating density of 3.25 g cm−3. Raman spectroscopy was performed to probe for sp2/sp3 bonds in the coatings. The results indicate that low energy ion implantation with 6 kV produces hydrogenated amorphous carbon coatings with a sp3 content of about 20%. Results highlight the opportunity of developing room temperature DLC coatings with ion beam technology for industrial applications.

ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms - Volume 331, 15 July 2014, Pages 144–148
نویسندگان
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