Ion irradiation-induced phase transformation mechanisms in Y2O3 thin films

This work studies the ion irradiation-induced phase transformations in thin films of yttrium oxide. The films were deposited using an ion beam sputtering technique that allows the control of the order/disorder of the microstructure. As-deposited (disordered) and annealed (ordered) samples were irradiated by xenon ions at different energies and doses. Two different structural phase transformations were observed: cubic/amorphous-like and cubic/monoclinic. In both cases, it is shown that the pristine structure is of prime importance in the transformation process. The phase transformations are analysed in terms of structural extended defect nucleation originating from the oxygen network behaviour, which leads to polygonisation up to a nanocrystallite-like structure, followed by a phase transformation into a monoclinic structure.