کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
1681901 | 1518731 | 2012 | 4 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Lattice damage and waveguide properties of a proton-exchanged LiNbO3 crystal after oxygen-ion implantation
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کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه
مهندسی مواد
سطوح، پوششها و فیلمها
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چکیده انگلیسی
A z-cut LiNbO3 crystal was immersed in a molten benzoic acid for 10Â min and then was implanted with 6-MeV oxygen ions at a fluence of 6Â ÃÂ 1014 ions/cm2. Lattice damage in this crystal was measured by a Rutherford backscattering and channeling technique and was compared with lattice damage in a proton-exchanged LiNbO3 crystal and an oxygen-ion-implanted LiNbO3 crystal. A totally amorphous layer was formed at the crystal's surface after both proton exchange and oxygen-ion implantation processes were performed, even though either process alone never led to a relative disorder of the lattice up to 0.2. It indicates that the crystal lattice in the proton-exchanged layer is unstable and can be easily damaged by ion implantation subsequently. The waveguide structure formed by proton exchange was destroyed by oxygen-ion implantation. Oxygen-ion implantation induced an increase in extraordinary refractive index and formed another waveguide structure underneath the amorphous surface layer.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms - Volume 286, 1 September 2012, Pages 318-321
Journal: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms - Volume 286, 1 September 2012, Pages 318-321
نویسندگان
Qing Huang, Peng Liu, Tao Liu, Sha-Sha Guo, Lian Zhang, Xue-Lin Wang,