Monte Carlo calculation of electron Rutherford backscattering spectra and high-energy reflection electron energy loss spectra

The electron Rutherford backscattering spectra and high-energy reflection electron energy loss spectra have been calculated by a Monte Carlo method for bulk solids and overlayer/substrate systems. The simulation model is mainly based on the use of Mott cross section for elastic scattering and the use of Penn’s dielectric functional approach to the electron inelastic scattering inside the solid. Moreover, it has further considered the recoil energy loss of energetic electrons and the thermal vibration of atoms with an isotropic distribution of the velocity direction. The calculated energy loss spectra for Al/Pt and Al/Mo agree with the experimental spectra quite well. The signals owing to different kinds of atoms can be separated by taking the scatter for the maximum-scattering angle event along an electron trajectory as the Rutherford backscattering atom, enabling a theoretical estimation of the peak intensity ratio. Furthermore, the simulation has also indicated that the multiple scattering is the dominant process to the quasi-elastic and energy loss of the electrons and is responsible mainly to the difference on the peak intensity between the linear model and experiment.