کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
1682824 | 1518743 | 2012 | 6 صفحه PDF | دانلود رایگان |
Annealing and diffusion behavior of implanted silver in 6H–SiC has been investigated using Rutherford backscattering spectroscopy (RBS), channeling, Raman spectroscopy and scanning electron microscopy (SEM) techniques. Silver (109Ag+) ions with an energy of 360 keV were implanted in SiC to a fluence of 2 × 1016 cm−2 at room temperature (23 °C), 350 and 600 °C. After implantation the samples were annealed at temperatures up to 1400 °C. The results revealed that implantation at room temperature created an amorphous layer of about 270 nm from the surface while implantation at 350 and 600 °C retained a crystalline structure with more damage created for 350 °C implantation compared to 600 °C. Diffusion of implanted Ag accompanied by loss from the surface started at 1300 °C in the amorphous SiC with no diffusion observed in the crystalline SiC. A new model explaining this diffusion of silver accompanied silver loss is presented.
Journal: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms - Volume 274, 1 March 2012, Pages 120–125