Oxygen depth profiling with subnanometre depth resolution

A High-depth Resolution Elastic Recoil Detection (HR-ERD) set-up using a magnetic spectrometer has been taken into operation at the Helmholtz-Zentrum Dresden-Rossendorf for the first time. This instrument allows the investigation of light elements in ultra-thin layers and their interfaces with a depth resolution of less than 1 nm near the surface. As the depth resolution is highly influenced by the experimental measurement parameters, sophisticated optimisation procedures have been implemented. Effects of surface roughness and sample damage caused by high fluences need to be quantified for each kind of material. Also corrections are essential for non-equilibrium charge state distributions that exist very close to the surface. Using the example of a high-k multilayer SiO2/Si3N4Ox/SiO2/Si it is demonstrated that oxygen in ultra-thin films of a few nanometres thickness can be investigated by HR-ERD.