Highly charged ion impact induced nanodefects in diamond

We investigate the interaction of slow highly charged ion (SHCI) beams with insulating type Ib diamond (1 1 1) surfaces. Bismuth and Xenon SHCI beams produced using an Electron Beam Ion Trap (EBIT) and an Electron Cyclotron Resonance source (ECR) respectively, are accelerated onto type Ib diamond (1 1 1) surfaces with impact velocities up to ≈0.4 υBohr. SHCIs with charge states corresponding to potential energies between 4.5 keV and 110 keV are produced for this purpose. Atomic Force Microscopy analysis (AFM) of the diamond surfaces following SHCI impact reveals surface morphological modifications characterized as nanoscale craters (nano-craters). To interpret the results from Tapping Mode AFM analysis of the irradiated diamond surfaces we discuss the interplay between kinetic and potential energy in nano-crater formation using empirical data together with Stopping and Range of Ions in Matter (SRIM) Monte Carlo Simulations.