کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
1683928 1518755 2009 5 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Controlling nickel silicide phase formation by Si implantation damage
موضوعات مرتبط
مهندسی و علوم پایه مهندسی مواد سطوح، پوشش‌ها و فیلم‌ها
پیش نمایش صفحه اول مقاله
Controlling nickel silicide phase formation by Si implantation damage
چکیده انگلیسی

In the context of fabrication process of contacts in CMOS integrated circuits, we studied the effect of implantation-induced damage on the Ni silicide phase formation sequence. The device layers of Silicon-on-insulator samples were implanted with 30 or 60 keV Si ions at several fluences up to amorphization. Next, 10 or 30 nm Ni layers were deposited. The monitoring of annealing treatments was achieved with time-resolved X-ray diffraction (XRD) technique. Rutherford Backscattering Spectrometry and pole figure XRD were also used to characterize some intermediate phase formations. We show the existence of an implantation threshold (1 ions/nm2) from where the silicidation behaviour changes significantly, the formation temperature of the disilicide namely shifting abruptly from 800 to 450 °C. It is also found that the monosilicide formation onset temperature for the thinner Ni deposits increases linearly by about 30 °C with the amount of damage.

ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms - Volume 267, Issues 8–9, 1 May 2009, Pages 1285–1289
نویسندگان
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