کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
1684270 1518749 2010 5 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Development of a TOF-ERDA measurement system for analysis of light elements using a He beam
موضوعات مرتبط
مهندسی و علوم پایه مهندسی مواد سطوح، پوشش‌ها و فیلم‌ها
پیش نمایش صفحه اول مقاله
Development of a TOF-ERDA measurement system for analysis of light elements using a He beam
چکیده انگلیسی

A time-of-flight ERDA (TOF-ERDA) measurement system has been developed for the analysis of light elements. He ions are used for the incident beam, and recoil light ions are detected with the system. The system consists of a time detector and a silicon detector, and energy and velocity of recoil ion are measured simultaneously. The depth resolution of 21.6 ± 2.2 nm (FWHM) has been obtained by an ERDA measurement of a thin carbon layer onto a silicon wafer using a 5.7 MeV He beam. The mass resolution is better than 1 for elements up to oxygen. Maximum detectable depth of carbon in a PET film is about 650 nm. An ERDA measurement of implanted carbon in a silicon wafer has been demonstrated.

ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms - Volume 268, Issues 11–12, June 2010, Pages 2023–2027
نویسندگان
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