Energy loss of protons in SrTiO3 studied by medium energy ion scattering

The energy loss of medium energy protons (55-170 keV/amu) was studied for a thin SrTiO3 film on Si. The thickness of the film and the structure of the SrTiO3/Si interface was determined by the combination of X-ray photoelectron spectroscopy (XPS), Rutherford backscattering spectrometry (RBS) and medium energy ion scattering (MEIS). These film parameters, together with energy losses extracted from MEIS spectra, were used to calculate stopping cross sections of SrTiO3 by an iterative procedure. In comparison with Andersen and Ziegler values, the data are systematically lower over the whole energy range.