کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
1685944 1010583 2007 5 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Amorphous pockets in Si: Comparison of coupled molecular dynamics and TEM image contrast simulations with experimental results
موضوعات مرتبط
مهندسی و علوم پایه مهندسی مواد سطوح، پوشش‌ها و فیلم‌ها
پیش نمایش صفحه اول مقاله
Amorphous pockets in Si: Comparison of coupled molecular dynamics and TEM image contrast simulations with experimental results
چکیده انگلیسی

The size of collision cascades of heavy ions in silicon as calculated by molecular dynamics or other simulation methods is considerably larger than the size of the amorphous pockets observed by transmission electron microscopy (TEM). Using multislice TEM image contrast simulations with atom coordinates from molecular dynamics simulations, we show that the peripheries of the collision cascades should be visible in the TEM if they existed at the time of analysis. We argue that the most likely reason for the discrepancy is thermal annealing. In order to guarantee exactly the same TEM conditions in the simulation and the experiment, we have performed low-dose Ge, Te, and Pb implantations at cryogenic and room temperature, and use them in the comparison.

ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms - Volume 255, Issue 1, February 2007, Pages 105–109
نویسندگان
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