کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
1686399 | 1010598 | 2008 | 5 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Investigation of the projectile atomic number influence to the total sputtering yield in the keV energy region
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کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه
مهندسی مواد
سطوح، پوششها و فیلمها
پیش نمایش صفحه اول مقاله
![عکس صفحه اول مقاله: Investigation of the projectile atomic number influence to the total sputtering yield in the keV energy region Investigation of the projectile atomic number influence to the total sputtering yield in the keV energy region](/preview/png/1686399.png)
چکیده انگلیسی
The non-monotonous dependence of the total sputtering yield on the projectile atomic number, which is unexpected in the frame of the Sigmund linear cascade theory, is investigated using Monte Carlo simulations (program SRIM 2003). This effect is studied on the example of aluminum sputtering by six different projectiles (N, Ne, Al, Ar, Kr and Xe) at normal incidence. The incident projectile energy is 2Â keV. Investigation consists of the analyses of ASI distributions of sputtered atoms as well as of nuclear energy loss depth distributions of projectiles with fixed number of ejected atoms. The results show that the non-monotonous behavior of Y(Z) is due to the ability of projectiles somewhat lighter than aluminum to efficiently eject large number of atoms by formation of collision cascades in the subsurface region which are directed towards the surface. On the other hand, ions that are heavier or significantly lighter than aluminum cannot form this type of cascades - the heavier ions cannot transfer a lot of energy to recoils in a primary knock-on collision that will move towards the surface, while significantly lighter ions transfer the energy too deep into the target.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms - Volume 266, Issue 1, January 2008, Pages 49-53
Journal: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms - Volume 266, Issue 1, January 2008, Pages 49-53
نویسندگان
N. Bundaleski,