کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
1687223 | 1518754 | 2009 | 5 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Optimization of the working distance of an ion microprobe-forming system
دانلود مقاله + سفارش ترجمه
دانلود مقاله ISI انگلیسی
رایگان برای ایرانیان
کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه
مهندسی مواد
سطوح، پوششها و فیلمها
پیش نمایش صفحه اول مقاله
![عکس صفحه اول مقاله: Optimization of the working distance of an ion microprobe-forming system Optimization of the working distance of an ion microprobe-forming system](/preview/png/1687223.png)
چکیده انگلیسی
A high-resolution ion microprobe necessitates the use of a small working distance (the distance from the final quadrupole lens of a probe-forming system to the specimen) in order to produce a large demagnification. But at the same time a small working distance is a source of a number of practical difficulties. We have presented an approach for determining a working distance that provides the best spatial resolution with the main practical limitations taken into account. We used a probe-forming system acceptance as a criterion of optimality. The calculations have revealed the existence of an optimal working distance in a set of common probe-forming systems, but it can be achieved only after changing of a design of a final quadrupole lens. We proposed a possible design of conic lens that allows solving the problem of detectors location and creating a short focus system. Three-dimensional calculations of magnetic field within this lens predicted a good quality of field structure.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms - Volume 267, Issues 12â13, 15 June 2009, Pages 2036-2040
Journal: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms - Volume 267, Issues 12â13, 15 June 2009, Pages 2036-2040
نویسندگان
K.I. Melnik, D.V. Magilin, A.G. Ponomarev,