کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
1687351 | 1010652 | 2006 | 4 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Mixing behaviour of buried transition metal layer in silicon due to swift heavy ion irradiation
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کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه
مهندسی مواد
سطوح، پوششها و فیلمها
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چکیده انگلیسی
The changes in behaviour of mixing at the interface of Si/Me/Si (Me = V, Fe, Co) due to irradiation by swift heavy ions of Au at 120 MeV with respect to the ion dose is reported here. The fluences were varied from 1 Ã 1013 to 1 Ã 1014 ions/cm2 on the bi-layers of Si/Me/Si (Me = V, Fe, Co). The interface of Si/Me (Me = V, Fe, Co) was characterized using Rutherford backscattering spectroscopy (RBS) and secondary ion mass spectrometry (SIMS). In all the three cases, the atomic mixing width was found to be increasing monotonically with ion fluence. The mixing rate calculations were made and the diffusivity values thus obtained suggested a transient melt phase at the interface according to thermal spike model. Further work on the irradiated samples for characterizing the buried layers and formation of stable silicide phases by annealing are being carried out.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms - Volume 244, Issue 1, March 2006, Pages 209-212
Journal: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms - Volume 244, Issue 1, March 2006, Pages 209-212
نویسندگان
B.R. Chakraborty, D. Kabiraj, K. Diva, J.C. Pivin, D.K. Avasthi,