کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
1688356 | 1518966 | 2014 | 9 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Texture change of TiN films due to anisotropic incorporation of oxygen
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کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه
مهندسی مواد
سطوح، پوششها و فیلمها
پیش نمایش صفحه اول مقاله
![عکس صفحه اول مقاله: Texture change of TiN films due to anisotropic incorporation of oxygen Texture change of TiN films due to anisotropic incorporation of oxygen](/preview/png/1688356.png)
چکیده انگلیسی
Results of comprehensive structural and microchemical analyses revealed the mechanisms responsible for changing the <111> to <001> competitive growth texture of TiN films when the level of oxygen doping was 20Â at.%. It has been shown that the growth competition is related to the different way of segregation-incorporation of the oxygen species on the {001} and {111} crystal faces. Oxygen is preferentially segregated on the {111} crystal face and is growing in the form of a 2D TiO2 surface layer on the growth surface, limiting the growth of <111> oriented crystals. On the {001} faces, however, the major part of condensing oxygen species is dissolved into the crystal lattice and only a part forms TiO2 aggregates. These aggregates have a 3D morphology which do not hinder the growth of <001> oriented crystals. Consequently, the <001> oriented crystals win the growth competition leading to a film structure constituted of V-shaped columns.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Vacuum - Volume 103, May 2014, Pages 78-86
Journal: Vacuum - Volume 103, May 2014, Pages 78-86
نویسندگان
D. Biro, M.F. Hasaneen, L. Székely, M. Menyhárd, S. Gurbán, P. Pekker, I. Dódony, P.B. Barna,