کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
1688471 | 1518960 | 2014 | 7 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Comparison of spatial distributions of atomic oxygen and hydrogen in ICP by means of catalytic probes and actinometry
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کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه
مهندسی مواد
سطوح، پوششها و فیلمها
پیش نمایش صفحه اول مقاله
![عکس صفحه اول مقاله: Comparison of spatial distributions of atomic oxygen and hydrogen in ICP by means of catalytic probes and actinometry Comparison of spatial distributions of atomic oxygen and hydrogen in ICP by means of catalytic probes and actinometry](/preview/png/1688471.png)
چکیده انگلیسی
Low pressure inductively coupled plasma was investigated with a combination of two diagnostic techniques: catalytic probes and optical emission spectroscopy (actinometry). Three working gases were used: oxygen, oxygen-argon mixture and hydrogen. Concentrations of oxygen and hydrogen atoms were determined in a wide range of plasma parameters, with pressure ranging from 10Â Pa to 70Â Pa, applied power in the range from 50 to 250Â W and at many different positions throughout the system (including the coil and afterglow in sample chamber). Concentrations of oxygen atoms were measured to be 1.3Â ÃÂ 1015Â cmâ3 in the middle of the coil and 4Â ÃÂ 1012Â cmâ3 in the regions of the chamber furthest from the coil. These spatially resolved concentrations are very important in plasma processing of materials, because radical concentrations over the sample determine plasma-material interactions. This work demonstrates that a relatively simple detection system can be practical and sufficiently successful in many plasma applications.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Vacuum - Volume 109, November 2014, Pages 8-14
Journal: Vacuum - Volume 109, November 2014, Pages 8-14
نویسندگان
Z. Kregar, R. Zaplotnik, M. MozetiÄ, S. MiloÅ¡eviÄ,