کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
1688655 1518981 2013 5 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Amorphous SiCN diaphragm for transmission electron microscope with environmental-cell fabricated by plasma-enhanced chemical vapor deposition
موضوعات مرتبط
مهندسی و علوم پایه مهندسی مواد سطوح، پوشش‌ها و فیلم‌ها
پیش نمایش صفحه اول مقاله
Amorphous SiCN diaphragm for transmission electron microscope with environmental-cell fabricated by plasma-enhanced chemical vapor deposition
چکیده انگلیسی

For use as a diaphragm in an environmental-cell transmission electron microscope (E-cell TEM) system, amorphous silicon carbon nitride (a-SiCN) films were applied to a Cu grid with 100-μm-diameter holes by plasma-enhanced chemical vapor deposition. The applied films were characterized by X-ray photoelectron spectroscopy and TEM and their capacity to resist pressure were measured. The films were amorphous and transparent at 200 kV and no charge-up was observed. The films had a resist pressure of about 100 kPa. Gold nanoparticles in the reaction gas could be observed in-situ by using the developed diaphragm in the E-cell TEM system.

ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Vacuum - Volume 88, February 2013, Pages 83–87
نویسندگان
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