Cryogenic pulsed laser deposition of ZnO

► PLD provides special opportunity for growth of amorphous thin films. ► Undoped ZnO was applied as the demonstration example. ► As-grown samples exhibited fully amorphous and stable structure. ► Annealing of amorphous films led to the recrystallization process. ► Properties of recrystallized structures varied according to annealing temperature.