Surface oxygen in the growth of plasma polymerised thin films

► Non-oxygen containing monomers plasma polymerised to determine surface oxygen content. ► The three monomers were benzene, ferrocene, and octafluorocyclobutane. ► Oxygen concentration on surface of ferrocene films was the largest. ► Oxygen concentration on surface of octafluorocyclobutane films was the smallest. ► Depth-profiling used to obtain oxygen content into the bulk of the films.