Determination of diffusion coefficients in film systems on the basis of Fe/Cr and Cu/Cr

This paper presents the results of investigation of condensation stimulated (CSD) and thermal stimulated (TSD) diffusion in nanoscale film systems on the basis of Fe/Cr and Cu/Cr by Auger-electron spectroscopy method. The film systems were built in ultrahigh vacuum. Auger spectrum was traced during condensation after each increase in thickness of 0.5–1 nm or during film systems annealing from 300 to 683 K over 5 h. According to experimental data the concentration profiles were built and the effective coefficients of CSD and TSD were computed by several mathematical methods. The efficiency of these techniques in different cases was analyzed. The most accurate results were obtained with Weeple and Gauss error methods that take into account the thickness of the diffusant source.

► Tracing Auger spectrum during condensation and thermal annealing.
► Building the concentration profiles according to experimental data.
►  Computation of effective condensation and thermal stimulated diffusion coefficients.
► Analysis of mathematical methods efficiency used for computation.