کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
1689301 | 1011225 | 2007 | 5 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Secondary ion emission from Ti and Si targets induced by medium energy Ar+ ion bombardment - Experiment and computer simulation
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کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه
مهندسی مواد
سطوح، پوششها و فیلمها
پیش نمایش صفحه اول مقاله
![عکس صفحه اول مقاله: Secondary ion emission from Ti and Si targets induced by medium energy Ar+ ion bombardment - Experiment and computer simulation Secondary ion emission from Ti and Si targets induced by medium energy Ar+ ion bombardment - Experiment and computer simulation](/preview/png/1689301.png)
چکیده انگلیسی
The paper presents experimental results of secondary ion energy distributions obtained for Ti and Si targets bombarded by 20-30Â keV monoisotope Ar+ ion beam. The influence of the extraction voltages between target and a slit of the electrostatic energy analyzer entrance on the energy distributions of secondary ions was investigated. After optimization of the secondary ion extraction system, the mass spectra of secondary ions were also measured. The investigations were done using recently built experimental system. Experimental data are compared with the computer simulation results obtained using TRQR and SATVAL codes.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Vacuum - Volume 81, Issue 10, 15 June 2007, Pages 1145-1149
Journal: Vacuum - Volume 81, Issue 10, 15 June 2007, Pages 1145-1149
نویسندگان
K. Pyszniak, A. Droździel, M. Turek, A. Wójtowicz, J. Sielanko,