Ion-molecule reactions in mixtures of methane with carbon tetrafluoride

Ion-molecule reactions have been measured for methane-carbon tetrafluoride mixtures of different composition using a quadrupole mass spectrometer with a high-pressure ion source. Concentration of methane in these mixtures ranged from 10% to 90% (at 10% increment). Primary ions CH3+, CH4+, F+, CF+ and CF3+ were produced by electrons with energy of 300 eV. Secondary ions CH5+, C2H3+, C2H4+, C2H5+, C2H7+ and CF3+ were observed as the result of ion-molecule reactions. Relative current intensities for primary and secondary ions are presented as a function of both total mixture pressure and concentration of methane in the mixture. Potential of repeller electrode inside the ion source collision chamber was fixed at 5 V for all measurements. Total mixture pressure was changed from 0.7 to 33.3 Pa. Schemes of ion-molecule reactions were proposed.