کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
1689445 1011229 2009 6 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Growth defects in PVD hard coatings
موضوعات مرتبط
مهندسی و علوم پایه مهندسی مواد سطوح، پوشش‌ها و فیلم‌ها
پیش نمایش صفحه اول مقاله
Growth defects in PVD hard coatings
چکیده انگلیسی

In PVD coatings, various growth defects typically appear during the deposition. Such defects are drawbacks in coating application. In order to improve the tribological properties of PVD hard coatings it is important to minimize the defect density. Various PVD hard coatings were prepared by evaporation using a thermionic arc and by sputtering using unbalanced magnetron sources. Coating topography was analyzed using a 3D stylus profilometer and other analytical techniques (SEM, FIB). We studied the influence of different types of substrate materials, the substrate position in the vacuum chamber, pre-treatment and deposition parameters on defect density.

ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Vacuum - Volume 84, Issue 1, 25 August 2009, Pages 209–214
نویسندگان
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