کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
1689445 | 1011229 | 2009 | 6 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Growth defects in PVD hard coatings
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موضوعات مرتبط
مهندسی و علوم پایه
مهندسی مواد
سطوح، پوششها و فیلمها
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چکیده انگلیسی
In PVD coatings, various growth defects typically appear during the deposition. Such defects are drawbacks in coating application. In order to improve the tribological properties of PVD hard coatings it is important to minimize the defect density. Various PVD hard coatings were prepared by evaporation using a thermionic arc and by sputtering using unbalanced magnetron sources. Coating topography was analyzed using a 3D stylus profilometer and other analytical techniques (SEM, FIB). We studied the influence of different types of substrate materials, the substrate position in the vacuum chamber, pre-treatment and deposition parameters on defect density.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Vacuum - Volume 84, Issue 1, 25 August 2009, Pages 209–214
Journal: Vacuum - Volume 84, Issue 1, 25 August 2009, Pages 209–214
نویسندگان
P. Panjan, M. Čekada, M. Panjan, D. Kek-Merl,