کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
1689788 1011240 2007 7 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Applicability of self-consistent global model for characterization of inductively coupled Cl2 plasma
موضوعات مرتبط
مهندسی و علوم پایه مهندسی مواد سطوح، پوشش‌ها و فیلم‌ها
پیش نمایش صفحه اول مقاله
Applicability of self-consistent global model for characterization of inductively coupled Cl2 plasma
چکیده انگلیسی

Investigations of the influence of gas pressure and input power on the Cl2 plasma parameters in the inductively coupled plasma system were carried out. The investigations combined plasma diagnostics by Langmuir probe with plasma modeling represented by the self-consistent global model with Maxwellian approximation for the electron energy distribution function. From the experiments, it was found that the increase of gas pressure in the range of 0.27–3.33 Pa for 400–700 W of input power results in a decrease in both electron temperature (3.3–2.0 eV) and density (6.5×1016−3.0×1016 m−3 for 400 W and 1.2×1017–6.7×1016 m−3 for 700 W). For the given range of experimental conditions, the model showed an outstanding agreement with the experiments and provided the data on kinetics of plasma active species, their densities and fluxes.

ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Vacuum - Volume 81, Issue 5, 5 January 2007, Pages 669–675
نویسندگان
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