کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
1689839 | 1011242 | 2009 | 5 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Simulation of the thin-film thickness distribution for an OLED thermal evaporation process
دانلود مقاله + سفارش ترجمه
دانلود مقاله ISI انگلیسی
رایگان برای ایرانیان
موضوعات مرتبط
مهندسی و علوم پایه
مهندسی مواد
سطوح، پوششها و فیلمها
پیش نمایش صفحه اول مقاله
چکیده انگلیسی
A design of an OLED (organic light-emitting device) fabrication system strongly depends on a thermal evaporation process. In an OLED evaporation process, the essential requirements include good uniformity of the film thickness over a glass substrate. In this paper, a process simulation model was developed to predict the film thickness distribution by understanding system design parameters that affect the uniformity of film thickness. Based on the method developed in this study, the uniformity of the thickness in an organic layer was successfully controlled. The developed method allowed the manufacture of high quality OLED displays.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Vacuum - Volume 83, Issue 5, 1 January 2009, Pages 848–852
Journal: Vacuum - Volume 83, Issue 5, 1 January 2009, Pages 848–852
نویسندگان
Eungki Lee,