کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
1689934 1518950 2015 6 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Back diffusion of iron impurity during silicon purification by vacuum directional solidification
ترجمه فارسی عنوان
انتشار بی اثر ناخالصی آهن در طی تمیز کردن سیلیکون بوسیله خلاء جهت جوشاندن
کلمات کلیدی
پاک کردن سیلیکون، خنک کننده جهت پشت انتشار، ناخالصی آهن
موضوعات مرتبط
مهندسی و علوم پایه مهندسی مواد سطوح، پوشش‌ها و فیلم‌ها
چکیده انگلیسی


• Back diffusion during Si purification by directional solidification is investigated.
• Affecting factors of iron impurity back diffusion are discussed.
• Back diffusion degree of iron in solidification process is calculated.
• Distribution of iron can be more accurately calculated or predicted.

A theoretical model for investigating the back diffusion of iron impurity during silicon purification by vacuum directional solidification is proposed in this paper. The back diffusion of iron impurity in directional solidification process can markedly reduce the purifying effect; thus, clarifying the back-diffusion behavior of iron impurity has great significance in silicon purification by directional solidification. Results show that the influence of back diffusion becomes more obvious with increased solidification proportion. At the end of solidification, the degree of back diffusion relative to Scheil equation calculation reaches nearly 200%. Experimental verification reveals that the calculation that considers back diffusion is more consistent with experimental results than when back diffusion is ignored. Thus, the distribution of iron impurity during silicon purification by directional solidification can be more accurately calculated or predicted when back-diffusion is considered in solidification.

ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Vacuum - Volume 119, September 2015, Pages 270–275
نویسندگان
, , , ,