Characterization of spatial plasma distribution in a divergence-type ECR-PECVD system

The spatial distribution of electron cyclotron resonance plasma in ECR-PECVD reaction chamber is diagnosed by a Langmuir probe and the effect of the magnetic field is also investigated. The results show that the ECR plasma in the upper region has poor radial and axial uniformity, whereas the plasma in the downstream region has fine radial uniformity. Changing of magnetic coil currents does not distort the characteristics of spatial distribution in the reaction chamber.