Keywords: ECR پلاسما; Plasma sterilization; ECR plasma; Pulsed microwave; Small vial;
مقالات ISI ECR پلاسما (ترجمه نشده)
مقالات زیر هنوز به فارسی ترجمه نشده اند.
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Keywords: ECR پلاسما; Vertically aligned graphene nanosheets (VAGNS); ECR plasma; Microwave assisted etching; Anode for lithium ion battery;
Keywords: ECR پلاسما; Si NW; Ag; ECR plasma; H2; Contact Angle
ECR plasma deposited a-SiCN:H as insulating layer in piezoceramic modules
Keywords: ECR پلاسما; ECR plasma; Substrate bias; Silicon carbonitride; Mechanical properties; Electrical properties;
Magnetic properties of Co-N films deposited by ECR nitrogen/argon plasma with DC negative-biased Co target
Keywords: ECR پلاسما; Co-N films; ECR plasma; Magnetic properties;
Top surface modification of carbon film on its structure, morphology and electrical resistivity using electron-ion hybrid irradiation in ECR plasma
Keywords: ECR پلاسما; ECR plasma; Electron-ion hybrid irradiation; Surface structural transition; Electrical resistivity; Surface roughness;
Influence of mixture compositions on ion energy distributions in Ar/N2 electron cyclotron resonance plasma
Keywords: ECR پلاسما; Ion energy distributions; Mixture compositions; ECR plasma;
Etching of CVD diamond films using oxygen ions in ECR plasma
Keywords: ECR پلاسما; Diamond film; Etching; Sheath; ECR plasma; Oxygen ion;
Development of a 915Â MHz ECR plasma source
Keywords: ECR پلاسما; ECR plasma; L-cutoff density; Large diameter plasma; Low electron temperature plasma;
Analysis of dissociative excitation reactions of CH3CN with the ECR plasmas of Ar and He
Keywords: ECR پلاسما; ECR plasma; Optical emission; CN radicals; Hydrogenated amorphous carbon nitride
Cross-linked graphene layer embedded carbon film prepared using electron irradiation in ECR plasma sputtering
Keywords: ECR پلاسما; ECR plasma; Electron irradiation; Graphene layer embedded carbon; Friction mechanism;
A comparison of nitrous oxide and hydrogen ECR plasma discharges for silicon solar cell passivation
Keywords: ECR پلاسما; Silicon solar cells; Passivation; Nitrous oxide; ECR plasma
Development of large diameter ECR plasma source
Keywords: ECR پلاسما; ECR plasma; Large area plasma source; Upper hybrid resonance; L-cutoff density; Ion saturation current
Electrical characterization of high-k gate dielectrics on Ge with HfGeN and GeO2 interlayers
Keywords: ECR پلاسما; Ge channel; MISFET; High-k/Ge gate stack; ECR plasma
Investigation of mask selectivities and diamond etching using microwave plasma-assisted etching
Keywords: ECR پلاسما; ECR plasma; Diamond etching; Etch selectivity; Masks
Deposition of dense and smooth Ti films using ECR plasma-assisted magnetron sputtering
Keywords: ECR پلاسما; Ti thin film; Magnetron sputtering; ECR plasma
KEKCB-18 GHz ECR charge breeder at TRIAC
Keywords: ECR پلاسما; 29.25.−t; 29.25.Rm; 52.40.MjRadioactive ion beam; ECR charge breeder; Charge breeding efficiency; ECR plasma; Beam impurity
Investigation of plasma parameters in 915 MHz ECR plasma with SiH4/H2 mixtures
Keywords: ECR پلاسما; Microcrystalline silicon; ECR plasma; Electron temperature; High deposition rate
Thermal stability of carbon nitride thin films prepared by electron cyclotron resonance plasma assisted pulsed laser deposition
Keywords: ECR پلاسما; Carbon nitride; Thermal stability; Heat annealing; ECR plasma; Plasma assisted pulsed laser deposition
ECR plasma assisted deposition of zinc nanowires
Keywords: ECR پلاسما; 52.40âw; 81.07.Bc; 62.23.Hj; 07.79.Cz; 1-D nanowires; Nanoparticles; Zinc; Zinc hydride; ECR plasma;
Effect of NH3 flow rate on growth, structure and luminescence of amorphous silicon nitride films by electron cyclotron resonance plasma
Keywords: ECR پلاسما; ECR plasma; Amorphous silicon nitride; Photoluminescence; Electroluminescence
Scanning tunneling microscopic and field emission microscopic studies of nanostructured molybdenum film synthesized by electron cyclotron resonance plasma
Keywords: ECR پلاسما; Mo nanoparticles; ECR plasma; Hollow cathode chemical sputtering; Scanning tunneling microscopy; Field emission microscopy;
Low-pressure plasma generation inside slender tubes
Keywords: ECR پلاسما; ECR plasma; Coaxial magnetron; Magnetized discharge; Inner wall; Slender tube;
Mechanism of dissociative excitation of BrCN in electron cyclotron resonance plasma flow of He
Keywords: ECR پلاسما; ECR plasma; Dissociation; Optical emission; CN radicals; Amorphous carbon nitride;
Surface modification of polymers by atomic oxygen using ECR plasma
Keywords: ECR پلاسما; 52.77.−j; 42.70.Jk; 81.40.Wx; 81.65.−bAtomic oxygen; Polyimide; FEP; ECR Plasma; Contact angle; AFM; XPS
The effects of the operational parameters of the reactor on ECR plasma characteristics
Keywords: ECR پلاسما; ECR plasma; Numerical simulation; Electron density; Electron temperature;
N-rich Zr–N films deposited by unbalanced magnetron sputtering enhanced with a highly reactive MW-ECR plasma
Keywords: ECR پلاسما; Zr–N Film; ECR Plasma; Magnetron sputtering; Plasma diagnostic
Characterization of spatial plasma distribution in a divergence-type ECR-PECVD system
Keywords: ECR پلاسما; ECR plasma; ECR-PECVD; Spatial distribution;
Removal efficiency of organic contaminants on Si wafer surfaces by the N2O ECR plasma technique
Keywords: ECR پلاسما; Dry cleaning; Organic contaminants; ECR plasma; ATR-FTIR;
Gas mixture ratio dependence of ion temperature in ECR plasma
Keywords: ECR پلاسما; ECR plasma; Ion temperature; Optical emission spectroscopy; N2/Ar plasma; O2/Ar plasma;
Spatially resolved X-ray spectroscopy of an ECR plasma - indication for evaporative cooling
Keywords: ECR پلاسما; 32.30.Rj; 52.25.Jm; Spectroscopic imaging; ECR plasma; X-ray spectroscopy; Evaporative cooling; Highly charged ions;